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Correction for the loss of depth resolution with accurate depth calibration when profiling with Cs+ at angles of incidence above 50 degrees to normal
Kelly,
J. H..
13th International Conference on Secondary Ion Mass Spectrometry and Related Topics (SIMS XIII).
v.
Volume 203.
2003-01-15.
p.
260 -
263...
issn:
0169-4332
.
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