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Overcoming low Ge ionization and erosion rate variation for quantitative ultralow energy secondary ion mass spectrometry depth profiles of Si1–xGex/Ge quantum well structures
Morris,
R. J. H. (Richard J. H.).
Analytical Chemistry.
v.
Vol.84.
no.
No.5.
2012-03-06.
p.
2292 -
2298...
issn:
0003-2700
.
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