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Depth profile and lattice location analysis of Sb atoms in Si/Sb(-doped)/Si(001) structures using medium-energy ion scattering spectroscopy
Kobayashi,
T..
Applied Physics Letters.
v.
Vol.74.
no.
No.5.
1999-02-01.
p.
673 -
675...
issn:
0003-6951
.
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