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Accuracy of thickness measurement for Ge epilayers grown on SiGe/Ge/Si(100) heterostructure by x-ray diffraction and reflectivity
Liu, Xue-Chao.  Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures.  v. Vol.29. no. No.1.   2011-01. p. 72 - issn: 1071-1023 .   

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