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Multi-field simulations and characterization of CMOS-MEMS high-temperature smart gas sensors based on SOI technology
Lu,
Chih-Cheng.
Journal of Micromechanics and Microengineering.
v.
Vol.18.
no.
No.7.
2008-07.
p.
94 -
issn:
0960-1317
.
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