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Ion yields and erosion rates for Si1−xGex(0x1) ultralow energy O2+ secondary ion mass spectrometry in the energy range of 0.25–1 keV
Morris,
R. J. H. (Richard J. H.).
Journal of Applied Physics.
v.
Vol.105.
no.
No.11.
2009-06-01.
p.
06 -
issn:
0021-8979
.
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