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Application of high-resolution X-ray diffraction to study strain status in Si1-xGex/Si1-yGey/Si (001) heterostructures
9th International Conference on Defects: Recognition, Imaging and Physics in Semiconductors (DRIP IX).
v.
91.
no.
Sp. Iss. SI.
2002-04-30.
p.
453 -
456...
issn:
0921-5107
.
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