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SI0.57GE0.43 ALLOY LAYERS IMPLANTED WITH OXYGEN - SPUTTERING YIELDS AND ATOMIC COMPOSITION DEPTH PROFILES
SYMP OF THE 1991 SPRING MEETING OF THE EUROPEAN MATERIALS RESEARCH SOC : HIGH ENERGY ION IMPLANTATION.
v.
62.
no.
3.
1992-01.
p.
325 -
330...
issn:
0168-583X
.
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