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Si1-x Ge x /Si interface profiles measured to sub-nanometer precision using uleSIMS energy sequencing
Morris,
R. J. H. (Richard J. H.).
Journal of The American Society for Mass Spectrometry.
v.
27.
no.
10.
2016-10.
p.
1694 -
1702...
issn:
1044-0305
.
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