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Antimony diffusion in silicon gemanium alloys under point defect injection
Symposium on Silicon-based Heterostructure Materials held at the 8th IUMRS International Conference on Electronic Materials (IUMRS-ICEM2002).
v.
16.
no.
28-29.
2002-11-20.
p.
4195 -
4198...
issn:
0217-9792
.
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