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Quantification of secondary-ion-mass spectroscopy depth profiles using maximum entropy deconvolution with a sample independent response function
4th Meeting of the Ultra-Shallow Junctions Workshop on Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors.
v.
16.
no.
1.
1998-01.
p.
377 -
381...
issn:
1071-1023
.
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