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RBS analysis of MBE grown SiGe/(001)Si heterostructures with thin high Ge content SiGe channels for HMOS transistors
Workshop on Advanced Materials Produced and Analyzed with Ion Beams.  v. 15. no. 28-29.   2001-12-20. p. 1297 - 1304... issn: 0217-9849 .   

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