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RBS analysis of MBE grown SiGe/(001)Si heterostructures with thin high Ge content SiGe channels for HMOS transistors
Workshop on Advanced Materials Produced and Analyzed with Ion Beams.
v.
15.
no.
28-29.
2001-12-20.
p.
1297 -
1304...
issn:
0217-9849
.
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