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END-POINT DETECTION USING ABSORBED CURRENT, SECONDARY-ELECTRON, AND SECONDARY ION SIGNALS DURING MILLING OF MULTILAYER STRUCTURES BY FOCUSED ION-BEAM
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B.
v.
11.
no.
2.
1993-03.
p.
263 -
267...
issn:
1071-1023
.
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