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SECONDARY ION MASS-SPECTROMETRY DEPTH PROFILING OF BORON, ANTIMONY, AND GERMANIUM DELTAS IN SILICON AND IMPLICATIONS FOR PROFILE DECONVOLUTION
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B.
v.
10.
no.
1.
1992-01.
p.
336 -
341...
issn:
1071-1023
.
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